Composition and optical properties of chromium oxynitride films

The films with various components were prepared by using the reaction gases N2 and O2 combined Cr2O3 CrN targets. focus of this study is at composition, optical, bandgap properties CrOxNy thin films. X-ray diffraction, photoelectron spectroscopy, ultraviolet–visible–near-infrared (UV-vis-NIR) spectroscopy used to investigate phase structure, chemical optical films, respectively. results show that mainly consisted CrO2 phases. (O + N)/Cr atomic ratio deduced from (XPS) in target increased increase nitrogen flow, whereas concentration samples was greatly affected flow. When oxygen flow as low 1.0 sccm, sample composed oxides. oxide presented a good transmittance 60%–80% visible range. bandgap, obtained absorption value, spanned range 1.3–2.6 eV. These provide an excellent suggestion for preparation chromium oxynitrides applied aspect mechanical, electrical properties.